Vibrator device

ABSTRACT

A vibrator device has the vibrator element, a support substrate supporting the vibrator element, and a plurality of interconnections disposed on the support substrate. The support substrate includes an element mounting base, a supporting base, a frame located between the element mounting base and the supporting base, inner beams for coupling the element mounting base and the frame to each other, and outer beams for coupling the frame and the supporting base to each other. The plurality of interconnections include a drive signal interconnection and a detection signal interconnection laid around to the element mounting base and the supporting base, and the drive signal interconnection and the detection signal interconnection are laid around to the element mounting base and the frame through the respective inner beams different from each other, and are laid around to the frame and the supporting base through the respective outer beams different from each other.

The present application is based on, and claims priority from JPApplication Serial Number 2019-197844, filed Oct. 30, 2019, thedisclosure of which is hereby incorporated by reference herein in itsentirety.

BACKGROUND 1. Technical Field

The present disclosure relates to a vibrator device.

2. Related Art

A vibrator device described in JP-A-2018-159674 (Document 1) includes acircuit element, a vibrator element, and a relay substrate whichintervenes between the circuit element and the vibrator element to fixthe vibrator element to the circuit element. Further, the relaysubstrate forms a gimbal structure, and has a fixed part shaped like aframe and fixed to the circuit element, a frame body part shaped like aframe and disposed inside the fixed part, a mounting part which isdisposed inside the frame body part and to which the vibrator element isfixed, a first beam part for coupling the fixed part and the frame bodypart to each other, and a second beam part for coupling the frame bodypart and the mounting part to each other. Due to such a relay substrate,transmission of a stress from the circuit element to the vibratorelement is suppressed.

Further, in the vibrator device described in Document 1, the mountingpart is provided with six vibrator element-side terminals electricallycoupled to the vibrator element, the fixed part is provided with sixcircuit element-side terminals electrically coupled to the circuitelement, and the vibrator element-side terminals and the circuitelement-side terminals corresponding to each other are electricallycoupled to each other with interconnections laid on the first beam part,the frame body part, and the second beam part.

However, in the vibrator device described in Document 1, a drivesignal-interconnection and a detection signal-interconnection includedin the plurality of interconnections are disposed close to each other onone beam part. Therefore, there is a possibility that a noise caused byan influence of the drive signal applied to the drivesignal-interconnection mixes in the detection signal-interconnection inthat part to deteriorate the detection accuracy.

SUMMARY

A vibrator device according to an aspect of the present disclosureincludes a vibrator element, a support substrate configured to supportthe vibrator element, and a plurality of interconnections provided tothe support substrate, wherein the vibrator element includes a drive armwhich is provided with a drive signal electrode, and performs a drivevibration in response to application of a drive signal to the drivesignal electrode, and a detection arm which is provided with a detectionsignal electrode, and performs a detection vibration in accordance witha physical quantity of a detection target to thereby output a detectionsignal from the detection signal electrode, the support substrateincludes, in a plan view from a thickness direction of the supportsubstrate, an element mounting base on which the vibrator element ismounted, a supporting base located outside the element mounting base, aframe located between the element mounting base and the supporting base,and shaped like a frame surrounding the element mounting base, innerbeams provided with a pair of first beams which extend toward both sidesalong a first direction from the element mounting base to couple theelement mounting base and the frame to each other, and outer beamsprovided with a pair of second beams which extend toward both sidesalong a second direction different from the first direction from theframe to couple the frame and the supporting base to each other, theplurality of interconnections includes a drive signal interconnectionwhich is electrically coupled to the drive signal electrode, and is laidaround to the element mounting base and the supporting base, and adetection signal interconnection which is electrically coupled to thedetection signal electrode, and is laid around to the element mountingbase and the supporting base, and the drive signal interconnection andthe detection signal interconnection are laid around to the elementmounting base and the frame through the respective inner beams differentfrom each other, and are laid around to the frame and the supportingbase through the respective outer beams different from each other.

In the aspect of the present disclosure, the outer beams may include athird beam which extends from the frame to couple the frame and thesupporting base to each other, and one of the drive signalinterconnection and the detection signal interconnection may be laidaround to the frame and the supporting base through the third beam.

In the aspect of the present disclosure, the outer beams may include apair of the third beams extending from the frame toward both sides ofthe frame, and the drive signal interconnection and the detection signalinterconnection may be laid around to the frame and the supporting basethrough the respective third beams different from each other.

In the aspect of the present disclosure, in the plan view, the thirdbeam may extend in the first direction, and may be located in alignmentwith the first beams.

In the aspect of the present disclosure, a number of theinterconnections passing through the third beam may be no larger thantwo.

In the aspect of the present disclosure, defining three axesperpendicular to each other as an A axis, a B axis, and a C axis, athickness direction of the support substrate may be parallel to the Caxis, and the vibrator element may include a base member fixed to theelement mounting base, a pair of the detection arms extending towardboth sides along the B axis from the base member, a pair of couplingarms extending toward both sides along the A axis from the base member,a pair of the drive arms extending toward both sides along the B axisfrom a tip part of one of the coupling arms, and a pair of the drivearms extending toward both sides along the B axis from a tip part of theother of the coupling arms.

In the aspect of the present disclosure, the first direction may be adirection along the A axis, and the second direction may be a directionalong the B axis.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view showing a vibrator device according toa first embodiment.

FIG. 2 is a plan view showing the vibrator device shown in FIG. 1 .

FIG. 3 is a plan view showing a vibrator element provided to thevibrator device shown in FIG. 1 .

FIG. 4 is a cross-sectional view along the line D-D in FIG. 3 .

FIG. 5 is a cross-sectional view along the line E-E in FIG. 3 .

FIG. 6 is a schematic diagram for explaining drive of the vibratorelement shown in FIG. 3 .

FIG. 7 is a schematic diagram for explaining the drive of the vibratorelement shown in FIG. 3 .

FIG. 8 is a plan view showing a support substrate.

FIG. 9 is a plan view showing a support substrate provided to a vibratordevice according to a second embodiment.

FIG. 10 is a plan view showing a modified example of the supportsubstrate shown in FIG. 9 .

FIG. 11 is a plan view showing a support substrate provided to avibrator device according to a third embodiment.

FIG. 12 is a plan view showing a modified example of the supportsubstrate shown in FIG. 11 .

FIG. 13 is a plan view showing a support substrate provided to avibrator device according to a fourth embodiment.

FIG. 14 is a plan view showing a modified example of the supportsubstrate shown in FIG. 13 .

DESCRIPTION OF EXEMPLARY EMBODIMENTS First Embodiment

FIG. 1 is a cross-sectional view showing the vibrator device accordingto a first embodiment. FIG. 2 is a plan view showing the vibrator deviceshown in FIG. 1 . FIG. 3 is a plan view showing a vibrator elementprovided to the vibrator device shown in FIG. 1 . FIG. 4 is across-sectional view along the line D-D in FIG. 3 . FIG. 5 is across-sectional view along the line E-E in FIG. 3 . FIG. 6 and FIG. 7are each a schematic diagram for explaining drive of the vibratorelement shown in FIG. 3 . FIG. 8 is a plan view showing a supportsubstrate.

It should be noted that in FIG. 1 through FIG. 8 , there are shown an Aaxis, a B axis, and a C axis as three axes perpendicular to each otherfor the sake of convenience of explanation. Further, hereinafter, thetip side of the arrow of each of the axes is also referred to as a“positive side,” and the opposite side is also referred to as a“negative side.” Further, the positive side and the negative side arealso referred to as “both sides.” Further, the positive side of the Caxis is also referred to as an “upper side,” and the negative sidethereof is also referred to as a “lower side.” Further, the plan viewfrom a thickness direction of the support substrate 4, namely adirection along the C axis, is also referred to simply as a “plan view.”

The vibrator device 1 shown in FIG. 1 is a physical quantity sensor fordetecting angular velocity ωc defining the C axis as the detection axis.By applying the vibrator device 1 to a physical quantity sensor, it ispossible to install the vibrator device 1 in a wide variety ofelectronic apparatuses, and thus, the vibrator device 1 which has a highdemand, and is high in convenience is achieved. Such a vibrator device 1has a package 2, a circuit element 3 housed in the package 2, thesupport substrate 4, and a vibrator element 6.

The package 2 has a base 21 provided with a recessed part 211 opening inan upper surface, and a lid 22 which is bonded to the upper surface ofthe base 21 via a bonding member 23 so as to close the opening of therecessed part 211. The recessed part 211 forms an internal space Sinside the package 2, and the circuit element 3, the support substrate4, and the vibrator element 6 are housed in the internal space S. Forexample, the base 21 can be formed of ceramics such as alumina, and thelid 22 can be formed of a metal material such as kovar. It should benoted that the constituent material of each of the base 21 and the lid22 is not particularly limited.

The internal space S is airtightly sealed, and is set in areduced-pressure state, and more preferably a state approximate to avacuum state. Thus, the viscosity resistance reduces and the vibrationcharacteristics of the vibrator element 6 are improved. It should benoted that the atmosphere in the internal space S is not particularlylimited, but can also be, for example, in the atmospheric pressure stateor a pressurized state.

Further, the recessed part 211 is constituted by a plurality of recessedparts arranged side by side in a direction along the C axis, and has arecessed part 211 a, a recessed part 211 b, and a recessed part 211 cwherein the recessed part 211 a opens in the upper surface of the base21, the recessed part 211 b opens in a bottom surface of the recessedpart 211 a and is smaller in opening width than the recessed part 211 a,and the recessed part 211 c opens in a bottom surface of the recessedpart 211 b and is smaller in opening width than the recessed part 211 b.Further, to the bottom surface of the recessed part 211 a, there isfixed the support substrate 4 in a state of supporting the vibratorelement 6, and to the bottom surface of the recessed part 211 c, thereis fixed the circuit element 3.

Further, as shown in FIG. 2 , in the internal space S, the vibratorelement 6, the support substrate 4, and the circuit element 3 aredisposed so as to overlap each other in a plan view. In other words, thevibrator element 6, the support substrate 4, and the circuit element 3are arranged along the C axis. Thus, it is possible to suppress theplanar spread towards the directions along the A axis and the B axis ofthe package 2, and thus, it is possible to achieve reduction in size ofthe vibrator device 1. Further, the support substrate 4 is locatedbetween the vibrator element 6 and the circuit element 3, and supportsthe vibrator element 6 so as to hold the vibrator element 6 from thelower side, namely the negative side of the C axis.

Further, as shown in FIG. 1 and FIG. 2 , on the bottom surface of therecessed part 211 a, there is disposed a plurality of internal terminals241, on the bottom surface of the recessed part 211 b, there is disposeda plurality of internal terminals 242, and on the lower surface of thebase 21, there is disposed a plurality of external terminals 243. Theinternal terminals 241, 242 and the external terminals 243 describedabove are electrically coupled via interconnections not shown formedinside the base 21 in accordance with the circuit design. Further, theinternal terminals 241 are electrically coupled to the vibrator element6 via bonding members B1, B2 having electrical conductivity and thesupport substrate 4, and the internal terminals 242 are electricallycoupled to the circuit element 3 via bonding wires BW.

The vibrator element 6 is an angular velocity sensor element capable ofdetecting the angular velocity ωc defining the C axis as the detectionaxis as the physical quantity sensor element. As shown in FIG. 3 , thevibrator element 6 has a vibrating substrate 7, and electrodes 8disposed on a surface of the vibrating substrate 7. The vibratingsubstrate 7 is formed of a Z-cut quartz crystal substrate. The Z-cutquartz crystal substrate has spread in an X-Y plane defined by an X axisas the electrical axis and a Y axis as the mechanical axis, and has athickness in a direction along a Z axis as an optical axis, theelectrical axis, the mechanical axis, and the optical axis being crystalaxes of the quartz crystal.

The vibrating substrate 7 has a base member 70, a pair of detection arms71, 72, a pair of coupling arms 73, 74, a pair of drive arms 75, 76, anda pair of drive arms 77, 78, wherein the base member 70 is located in acentral portion, the pair of detection arms 71, 72 extend toward bothsides in a direction along the B axis from the base member 70, the pairof coupling arms 73, 74 extend toward both sides in a direction alongthe A axis from the base member 70, the pair of drive arms 75, 76 extendtoward both sides in a direction along the B axis from a tip of thecoupling arm 73, and the pair of drive arms 77, 78 extend toward bothsides in a direction along the B axis from a tip of the coupling arm 74.By using the vibrating substrate 7 having such a shape, the vibratorelement 6 having excellent vibration balance is obtained.

Further, as shown in FIG. 4 and FIG. 5 , the drive arms 75 through 78each have a groove opening in the upper surface and a groove opening inthe lower surface to form a roughly H-shaped cross-sectional shape. Itshould be noted that regarding the detection arms 71, 72, it is possibleto provide a groove opening in the upper surface and a groove opening inthe lower surface to form a roughly H-shaped cross-sectional shape.

As shown in FIG. 3 , the electrodes 8 include a drive signal electrode81, a drive ground electrode 82, a first detection signal electrode 83as a detection signal electrode, a first detection ground electrode 84,a second detection signal electrode 85 as a detection signal electrode,and a second detection ground electrode 86.

The drive signal electrode 81 is disposed on both the side surfaces ofeach of the drive arms 75, 76, and the upper surface and the lowersurface of each of the drive arms 77, 78. Meanwhile, the drive groundelectrode 82 is disposed on the upper surface and the lower surface ofeach of the drive arms 75, 76, and both the side surfaces of each of thedrive arms 77, 78. Further, the first detection signal electrode 83 isdisposed on the upper surface and the lower surface of the detection arm71, and the first detection ground electrode 84 is disposed on both theside surfaces of the detection arm 71. Meanwhile, the second detectionsignal electrode 85 is disposed on the upper surface and the lowersurface of the detection arm 72, and the second detection groundelectrode 86 is disposed on both the side surfaces of the detection arm72.

Further, these electrodes 81 through 86 are each laid around to thelower surface of the base member 70. Further, as shown in FIG. 3 , onthe lower surface of the base member 70, there are disposed a terminal701 electrically coupled to the drive signal electrode 81, a terminal702 electrically coupled to the drive ground electrode 82, a terminal703 electrically coupled to the first detection signal electrode 83, aterminal 704 electrically coupled to the first detection groundelectrode 84, a terminal 705 electrically coupled to the seconddetection signal electrode 85, and a terminal 706 electrically coupledto the second detection ground electrode 86.

Such a vibrator element 6 detects the angular velocity ωc in thefollowing manner. Firstly, when applying a drive signal between thedrive signal electrode 81 and the drive ground electrode 82, the drivearms 75 through 78 flexurally vibrate as represented by the arrows shownin FIG. 6 . Hereinafter, this drive mode is referred to as a drivevibration mode. Further, when the angular velocity ωc is applied to thevibrator element 6 in the state of performing the drive in the drivevibration mode, a detection vibration mode shown in FIG. 7 is newlyexcited. In the detection vibration mode, a Coriolis force acts on thedrive arms 75 through 78 to excite the vibration in a directionrepresented by the arrows b, and in concert with this vibration, thedetection vibration due to the flexural vibration occurs in a directionrepresented by the arrows a in the detection arms 71, 72. A chargegenerated in the detection arm 71 due to such a detection vibration modeis taken out between the first detection signal electrode 83 and thefirst detection ground electrode 84 as a first detection signal, acharge generated in the detection arm 72 is taken out between the seconddetection signal electrode 85 and the second detection ground electrode86 as a second detection signal, and it is possible to detect theangular velocity ωc based on these first and second detection signals.

Going back to FIG. 1 , the circuit element 3 is fixed to the bottomsurface of the recessed part 211 c. The circuit element 3 includes adrive circuit and a detection circuit for driving the vibrator element 6to detect the angular velocity ωc applied to the vibrator element 6. Itshould be noted that the circuit element 3 is not particularly limited,and can include other circuits such as a temperature compensationcircuit.

Further, as shown in FIG. 1 , the support substrate 4 intervenes betweenthe base 21 and the vibrator element 6. The support substrate 4 mainlyhas a function of absorbing or relaxing the stress caused by adeformation of the base 21 to thereby make it difficult for the stressto reach the vibrator element 6.

Such a support substrate 4 is provided with a gimbal structure. As shownin FIG. 2 and FIG. 8 , in the plan view from the direction along the Caxis, the support substrate 4 has an element mounting base 41, asupporting base 42, a frame 43, inner beams 440, and outer beams 450wherein the vibrator element 6 is mounted on the element mounting base41, the supporting base 42 is located outside the element mounting base41, fixed to the base 21, and is shaped like a frame, the frame 43 islocated between the element mounting base 41 and the supporting base 42,and forms a frame-like shape surrounding the element mounting base 41,the inner beams 440 are provided with a pair of first beams 441, 442which extend toward both sides in the direction along the A axis as afirst direction from the element mounting base 41 to couple the elementmounting base 41 and the frame 43 to each other, and the outer beams 450are provided with a pair of second beams 451, 452 which extend towardboth sides in the direction along the B axis as a second direction fromthe frame 43 to couple the frame 43 and the supporting base 42 to eachother.

It should be noted that in the plan view in the direction along the Caxis, an imaginary straight line which passes through the center O ofthe element mounting base 41 and is parallel to the A axis ishereinafter defined as an imaginary straight line La, and an imaginarystraight line which passes through the center O and is parallel to the Baxis is hereinafter defined as an imaginary straight line Lb. Theelement mounting base 41, the supporting base 42, the frame 43, the pairof first beams 441, 442, and the pair of second beams 451, 452 are allarranged line-symmetrically about the imaginary straight line La, and atthe same time, arranged line-symmetrically about the imaginary straightline Lb. It should be noted that the shape of the support substrate 4 isnot limited thereto.

The frame 43 is shaped like a rectangular frame, and has a pair of edgeparts 431, 432 extending in a direction along the A axis, and a pair ofedge parts 433, 434 extending in a direction along the B axis.Similarly, the supporting base 42 is shaped like a rectangular frame,and has a pair of edge parts 421, 422 extending in a direction along theA axis, and a pair of edge parts 423, 424 extending in a direction alongthe B axis. In particular, in the present embodiment, in the plan viewin the direction along the C axis, the edge part 433 of the frame 43overlaps the drive arms 75, 76 of the vibrator element 6, and the edgepart 434 of the frame 43 overlaps the drive arms 77, 78 of the vibratorelement 6.

Further, the pair of first beams 441, 442 are respectively located onboth sides in a direction along the A axis of the element mounting base41, and couple the element mounting base 41 and the frame 43 to eachother so as to achieve the both ends support of the element mountingbase 41. Further, the pair of first beams 441, 442 are each arranged ona straight line along the imaginary straight line La. In other words,the first beam 441 couples the element mounting base 41 and a centralportion in the extending direction of the edge part 433 to each other,and the first beam 442 couples the element mounting base 41 and acentral portion in the extending direction of the edge part 434 of theframe 43 to each other. It should be noted that this is not alimitation, and for example, it is possible for the first beams 441, 442to be arranged so as to be shifted in a direction along the B axis fromeach other.

Further, the pair of second beams 451, 452 are respectively located onboth sides in a direction along the B axis of the frame 43, and couplethe frame 43 and the supporting base 42 to each other so as to achievethe both ends support of the frame 43. Further, the pair of second beams451, 452 are each arranged on a straight line along the imaginarystraight line Lb. In other words, the second beam 451 couples centralportions in the extending direction of the edge parts 431, 421 to eachother, and the second beam 452 couples central portions in the extendingdirection of the edge parts 432, 422 to each other. It should be notedthat this is nota limitation, and for example, it is possible for thesecond beams 451, 452 to be arranged so as to be shifted in a directionalong the A axis from each other.

By making the extending direction of the first beams 441, 442 and theextending direction of the second beams 451, 452 perpendicular to eachother as described above, it is possible to effectively absorb or relaxthe stress with the support substrate 4. Further, by extending the firstbeams 441, 442 in a direction along the A axis which is the samedirection as the extending direction of the coupling arms 73, 74, it ispossible to easily ensure an equivalent length to those of the couplingarms 73, 74. Therefore, it is possible to make the first beams 441, 442sufficiently long, and the stress relaxing effect described above isfurther enhanced. In particular, as described above, in the presentembodiment, in the plan view in the direction along the C axis, the edgepart 433 of the frame 43 overlaps the drive arms 75, 76, and the edgepart 434 of the frame 43 overlaps the drive arms 77, 78, and therefore,the length of the first beams 441, 442 is roughly equal to the length ofthe coupling arms 73, 74.

In such a support substrate 4, the base member 70 of the vibratorelement 6 is fixed to an upper surface of the element mounting base 41via the six bonding members B2 having electrical conductivity, and theedge parts 423, 424 of the supporting base 42 are fixed to the bottomsurface of the recessed part 211 a via the six bonding members B1 havingelectrical conductivity. More specifically, the edge part 423 of thesupporting base 42 is fixed to the bottom surface of the recessed part211 a via the three bonding members B1 having electrical conductivity,and the edge part 424 of the supporting base 42 is fixed to the bottomsurface of the recessed part 211 a via the three bonding members B1having electrical conductivity. By making the support substrate 4intervene between the vibrator element 6 and the base 21 as describedabove, it is possible to absorb or relax the stress transmitted from thebase 21 due to the support substrate 4, and thus, it becomes difficultfor the stress to reach the vibrator element 6. Therefore, it ispossible to effectively prevent the degradation and the fluctuation ofthe vibration characteristics of the vibrator element 6.

It should be noted that the bonding members B1, B2 are not particularlylimited as long as both of the electrical conductivity and the bondingproperty are provided, and it is possible to use, for example, a varietyof metal bumps such as gold bumps, silver bumps, copper bumps, or solderbumps, or an electrically conductive adhesive having an electricallyconductive filler such as a silver filler dispersed in a variety ofadhesives such as a polyimide type adhesive, an epoxy type adhesive, asilicone type adhesive, or an acrylic adhesive. When using the metalbumps which are in the former group as the bonding members B1, B2, it ispossible to suppress generation of a gas from the bonding members B1,B2, and it is possible to effectively prevent a change in environment,in particular rise in pressure, of the internal space S. On the otherhand, when using the electrically conductive adhesive which is in thelatter group as the bonding members B1, B2, the bonding members B1, B2become relatively soft, and it is possible to absorb or relax the stressdescribed above also in the bonding members B1, B2.

In the present embodiment, the electrically conductive adhesive is usedas the bonding members B1, and the metal bumps are used as the bondingmembers B2. By using the electrically conductive adhesive as the bondingmembers B1 for bonding the support substrate 4 and the base 21 asmaterials different in type from each other, the thermal stress causedby a difference in thermal expansion coefficient therebetween canefficiently be absorbed or relaxed by the bonding members B1. On theother hand, since the support substrate 4 and the vibrator element 6 arebonded to each other with six bonding members B2 disposed in arelatively small area, by using the metal bumps as the bonding membersB2, wetting spread which occurs in the case of the electricallyconductive adhesive is prevented, and thus, it is possible toeffectively prevent the bonding members B2 from having contact with eachother.

Such a support substrate 4 is formed of a quartz crystal substrate. Byforming the support substrate 4 of the quartz crystal substratesimilarly to the vibrating substrate 7 as described above, it ispossible to make the support substrate 4 and the vibrating substrate 7equal in thermal expansion coefficient to each other. Therefore, thethermal stress caused by the difference in thermal expansion coefficientfrom each other does not substantially occur between the supportsubstrate 4 and the vibrating substrate 7, and it becomes more difficultfor the vibrator element 6 to be subjected to stress. Therefore, it ispossible to more effectively prevent the degradation and the fluctuationof the vibration characteristics of the vibrator element 6.

In particular, the support substrate 4 is formed of the quartz crystalsubstrate with the same cutting angle as that in the vibrating substrate7 provided to the vibrator element 6. In the present embodiment, sincethe vibrating substrate 7 is formed of a Z-cut quartz crystal substrate,the support substrate 4 is also formed of the Z-cut quartz crystalsubstrate. Further, the directions of the crystal axes of the supportsubstrate 4 coincide with the directions of the crystal axes of thevibrating substrate 7. In other words, the support substrate 4 and thevibrating substrate 7 coincide with each other in the X axis, the Yaxis, and the Z axis. Since the quartz crystal is different in thermalexpansion coefficient between the direction along the X axis, thedirection along the Y axis, and the direction along the Z axis, bymaking the support substrate 4 and the vibrating substrate 7 the same incutting angle to uniform the directions of the crystal axes, it becomesmore difficult for the thermal stress described above to occur betweenthe support substrate 4 and the vibrating substrate 7. Therefore, itbecomes more difficult for the vibrator element 6 to be subjected to thestress, and thus, it is possible to more effectively prevent thedegradation and the fluctuation of the vibration characteristics of thevibrator element 6.

It should be noted that the support substrate 4 is not limited thereto,but can also be different in directions of the crystal axes from thevibrating substrate 7 although the same in cutting angle as thevibrating substrate 7. Further, the support substrate 4 can also beformed of a quartz crystal substrate different in cutting angle from thevibrating substrate 7. Further, the support substrate 4 is not requiredto be formed of the quartz crystal substrate, and in this case, thesupport substrate 4 can be formed of, for example, a silicon substrateor a resin substrate. In this case, it is preferable for the constituentmaterial of the support substrate 4 to be a material having a differencein thermal expansion coefficient from the quartz crystal smaller than adifference in thermal expansion coefficient between the quartz crystaland the constituent material of the base 21.

Further, as shown in FIG. 8 , on the support substrate 4, there aredisposed a plurality of interconnections 9 for electrically coupling theelectrodes 81 through 86 of the vibrator element 6 and the internalterminals 241 to each other. The plurality of interconnections 9includes a drive signal interconnection 91, a drive groundinterconnection 92, a first detection signal interconnection 93 as adetection signal interconnection, a first detection groundinterconnection 94, a second detection signal interconnection 95 as thedetection signal interconnection, and a second detection groundinterconnection 96. Further, these interconnections 91 through 96 areeach laid around to the element mounting base 41 and the supporting base42 through the inner beam 440, the frame 43, and the outer beam 450.

Further, the drive signal interconnection 91 is electrically coupled tothe terminal 701, namely the drive signal electrode 81, via the bondingmember B2 in the end part on the element mounting base 41, and iselectrically coupled to the internal terminal 241 via the bonding memberB1 in the end part on the supporting base 42. Further, the drive groundinterconnection 92 is electrically coupled to the terminal 702, namelythe drive ground electrode 82, via the bonding member B2 in the end parton the element mounting base 41, and is electrically coupled to theinternal terminal 241 via the bonding member B1 in the end part on thesupporting base 42.

Further, the first detection signal interconnection 93 is electricallycoupled to the terminal 703, namely the first detection signal electrode83, via the bonding member B2 in the end part on the element mountingbase 41, and is electrically coupled to the internal terminal 241 viathe bonding member B1 in the end part on the supporting base 42.Further, the first detection ground interconnection 94 is electricallycoupled to the terminal 704, namely the first detection ground electrode84, via the bonding member B2 in the end part on the element mountingbase 41, and is electrically coupled to the internal terminal 241 viathe bonding member B1 in the end part on the supporting base 42.

Further, the second detection signal interconnection 95 is electricallycoupled to the terminal 705, namely the second detection signalelectrode 85, via the bonding member B2 in the end part on the elementmounting base 41, and is electrically coupled to the internal terminal241 via the bonding member B1 in the end part on the supporting base 42.Further, the second detection ground interconnection 96 is electricallycoupled to the terminal 706, namely the second detection groundelectrode 86, via the bonding member B2 in the end part on the elementmounting base 41, and is electrically coupled to the internal terminal241 via the bonding member B1 in the end part on the supporting base 42.

Thus, the vibrator element 6 and the circuit element 3 are electricallycoupled to each other via these interconnections 91 through 96.

As shown in FIG. 8 , the drive signal interconnection 91, the firstdetection ground interconnection 94, and the second detection groundinterconnection 96 out of the six interconnections 91 through 96 areeach laid around to the supporting base 42 from the element mountingbase 41 through the first beam 441, the frame 43, and the second beam451. More particularly, the drive signal interconnection 91, the firstdetection ground interconnection 94, and the second detection groundinterconnection 96 are each laid around to the edge part 423 of thesupporting base 42 from the element mounting base 41 through the firstbeam 441, the edge parts 433, 431 of the frame 43, the second beam 451,and the edge part 421 of the supporting base 42. Further, these threeinterconnections 91, 94, and 96 are laid around in parallel to eachother and in an insulated state in an arrangement in which the firstdetection ground interconnection 94 and the second detection groundinterconnection 96 are located on both sides of the drive signalinterconnection 91, in other words, in an arrangement in which the drivesignal interconnection 91 is located between the first detection groundinterconnection 94 and the second detection ground interconnection 96.

The drive ground interconnection 92, the first detection signalinterconnection 93, and the second detection signal interconnection 95as the rest of the interconnections are each laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 442, the frame 43, and the second beam 452. More particularly, thedrive ground interconnection 92, the first detection signalinterconnection 93, and the second detection signal interconnection 95are each laid around to the edge part 424 of the supporting base 42 fromthe element mounting base 41 through the first beam 442 extending in anopposite direction to the first beam 441, the edge parts 434, 432 of theframe 43, the second beam 452, and the edge part 422 of the supportingbase 42. Further, these three interconnections 92, 93, and 95 are laidaround in parallel to each other and in an insulated state in anarrangement in which the first detection signal interconnection 93 andthe second detection signal interconnection 95 are located on both sidesof the drive ground interconnection 92, in other words, in anarrangement in which the drive ground interconnection 92 is locatedbetween the first detection signal interconnection 93 and the seconddetection signal interconnection 95.

Here, when focusing attention on the drive ground interconnection 91,the first detection signal interconnection 93, and the second detectionsignal interconnection 95, the drive signal interconnection 91 is laidaround to the supporting base 42 from the element mounting base 41through the first beam 441, the frame 43, and the second beam 451. Onthe other hand, the first and second detection signal interconnections93, 95 are laid around to the supporting base 42 from the elementmounting base 41 through the first beam 442, the frame 43, and thesecond beam 452. In other words, the drive signal interconnection 91 andthe first and second detection signal interconnections 93, 95 are laidaround to the element mounting base 41 and the supporting base 42passing through the respective inner beams 440 different from eachother, and further passing through the respective outer beams 450different from each other. In other words, when dividing the supportsubstrate 4 into four areas by the imaginary straight lines La, Lb asboundaries in the plan view, the interconnection path of the drivesignal interconnection 91 and the interconnection path of the firstdetection signal interconnection 93 and the second detection signalinterconnection 95 respectively pass through the areas located on thediagonal positions with respect to the center O.

Therefore, the drive signal interconnection 91 and the first and seconddetection signal interconnections 93, 95 are disposed with a sufficientdistance on the support substrate 4, and it becomes difficult for thedrive signal interconnection 91 and the first and second detectionsignal interconnections 93, 95 to interfere with each other. Therefore,it becomes difficult for the noise caused by the influence of the drivesignal applied to the drive signal interconnection 91 to mix in thefirst and second detection signal interconnections 93, 95, and it ispossible to prevent the deterioration of the S/N ratio of the first andsecond detection signals output from the first and second detectionsignal interconnections 93, 95. Therefore, it is possible to effectivelyprevent the degradation of the detection accuracy of the angularvelocity ωc.

In particular, as described above, the drive signal interconnection 91passes through the edge parts 433, 431 of the frame 43, and the firstand second detection signal interconnections 93, 95 pass through theedge parts 432, 434 of the frame 43. Therefore, the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are also disposed with a sufficient distance onthe frame 43. Therefore, it also becomes difficult for the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 to interfere with each other on the frame 43. Asa result, it becomes difficult for the noise caused by an influence ofthe drive signal applied to the drive signal interconnection 91 to mixin the first and second detection signal interconnections 93, 95, and itis possible to effectively suppress the deterioration of the detectionaccuracy of the angular velocity ωc.

Further, as described above, the drive signal interconnection 91 is laidaround to the edge part 423 through the edge part 421 of the supportingbase 42, and the first and second detection signal interconnections 93,95 are laid around to the edge part 424 through the edge part 422 of thesupporting base 42. Therefore, the drive signal interconnection 91 andthe first and second detection signal interconnections 93, 95 are alsodisposed with a sufficient distance on the supporting base 42.Therefore, it also becomes difficult for the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 to interfere with each other on the supportingbase 42. As a result, it becomes difficult for the noise caused by aninfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95, and it is possible to effectively suppress thedeterioration of the detection accuracy of the angular velocity ωc.

Further, in the present embodiment, as described above, the first andsecond detection ground interconnections 94, 96 are located on both thesides of the drive signal interconnection 91. Therefore, the first andsecond detection ground interconnections 94, 96 function as a shield,and thus, it becomes further difficult for the noise caused by theinfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95.

The vibrator device 1 is hereinabove described. As described above, sucha vibrator device 1 has the vibrator element 6, the support substrate 4supporting the vibrator element 6, and the plurality of interconnections9 disposed on the support substrate 4. Further, the vibrator element 6has the drive arms 75, 76, 77, and 78 and the detection arms 71, 72wherein the drive arms 75, 76, 77, and 78 are provided with the drivesignal electrode 81, and perform the drive vibration in response toapplication of the drive signal to the drive signal electrode 81, andthe detection arms 71, 72 have the first and second detection signalelectrodes 83, 85 as the detection signal electrodes, and perform thedetection vibration in response to the angular velocity ωc as thephysical quantity of the detection target to thereby output the firstand second detection signals as the detection signals from the first andsecond detection signal electrodes 83, 85. Further, in the plan viewfrom the direction along the C axis as the thickness direction of thesupport substrate 4, the support substrate 4 has the element mountingbase 41, the supporting base 42, the frame 43, the inner beams 440, andthe outer beams 450 wherein the vibrator element 6 is mounted on theelement mounting base 41, the supporting base 42 is located outside theelement mounting base 41, the frame 43 is located between the elementmounting base 41 and the supporting base 42, and forms a frame-likeshape surrounding the element mounting base 41, the inner beams 440 areprovided with the pair of first beams 441, 442 which extend toward boththe sides in the direction along the A axis as the first direction fromthe element mounting base 41 to couple the element mounting base 41 andthe frame 43 to each other, and the outer beams 450 are provided withthe pair of second beams 451, 452 which extend toward both the sides inthe direction along the B axis as the second direction different fromthe direction along the A axis from the frame 43 to couple the frame 43and the supporting base 42 to each other. Further, the plurality ofinterconnections 9 includes the drive signal interconnection 91 and thefirst and second detection signal interconnections 93, 95 as thedetection signal interconnections wherein the drive signalinterconnection 91 is electrically coupled to the drive signal electrode81, and the detection signal interconnections 93, 95 are electricallycoupled to the first and second detection signal electrodes 83, 85 andare laid around to the element mounting base 41 and the supporting base42. Further, the drive signal interconnection 91 and the first andsecond detection signal interconnections 93, 95 are laid around to theelement mounting base 41 and the frame 43 passing through the respectiveinner beams 440 different from each other, and further laid around tothe frame 43 and the supporting base 42 passing through the respectiveouter beams 450 different from each other.

By adopting such a configuration, the drive signal interconnection 91and the first and second detection signal interconnections 93, 95 aredisposed with a sufficient distance on the support substrate 4, and itbecomes difficult for the drive signal interconnection 91 and the firstand second detection signal interconnections 93, 95 to interfere witheach other. Therefore, it becomes difficult for the noise caused by theinfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95, and it is possible to prevent the deteriorationof the S/N ratio of the first and second detection signals output fromthe first and second detection signal interconnections 93, 95.Therefore, it is possible to effectively prevent the degradation of thedetection accuracy of the angular velocity ωc.

Further, as described above, when defining the three axes perpendicularto each other as the A axis, the B axis, and the C axis, the thicknessdirection of the support substrate 4 is parallel to the C axis, and thevibrator element 6 has the base member 70 fixed to the element mountingbase 41, the pair of detection arms 71, 72 extending toward both thesides along the B axis from the base member 70, the pair of couplingarms 73, 74 extending toward both the sides along the A axis from thebase member 70, the pair of drive arms 75, 76 extending toward both thesides along the B axis from the tip of the one coupling arm 73, and thepair of drive arms 77, 78 extending toward both the sides along the Baxis from the tip of the other coupling arm 74. By adopting such aconfiguration, there is achieved the vibrator element 6 which isexcellent in vibration balance, and has a high angular velocitydetection characteristic.

Further, as described above, the first direction in which the firstbeams 441, 442 extend is the direction along the A axis, and the seconddirection in which the second beams 451, 452 extend is the directionalong the B axis. Thus, the extending direction of the first beams 441,442 and the extending direction of the second beams 451, 452 becomeperpendicular to each other, and thus, it is possible to effectivelyabsorb or relax the stress with the support substrate 4. Further, byextending the first beams 441, 442 in a direction along the A axis whichis the same direction as the extending direction of the coupling arms73, 74, it is possible to easily ensure an equivalent length to those ofthe coupling arms 73, 74.

Second Embodiment

FIG. 9 is a plan view showing a support substrate provided to a vibratordevice according to a second embodiment. FIG. 10 is a plan view showinga modified example of the support substrate shown in FIG. 9 .

The present embodiment is substantially the same as the first embodimentdescribed above except the point that the configuration of the supportsubstrate 4 is different. It should be noted that in the followingdescription, the present embodiment will be described with a focus onthe difference from the first embodiment described above, and thedescription of substantially the same issues will be omitted. Further,in FIG. 9 , the constituents substantially the same as those of thefirst embodiment described above are denoted by the same referencesymbols.

As shown in FIG. 9 , in the support substrate 4 in the presentembodiment, the outer beams 450 are further provided with a third beam453 in addition to the configuration in the first embodiment describedabove. The third beam 453 mainly has a function of making it easy to layaround the interconnections 9. It should be noted that when making thewidth W3 of the third beam 453 excessively large, the degree of freedomof the frame 43 with respect to the supporting base 42 decreases to makethe stress easy to reach the vibrator element 6 from the base 21, andthus, there is a possibility that the degradation of the sensitivity ofthe vibrator element 6 is incurred. Therefore, the width W3 of the thirdbeam 453 is not particularly limited, but is preferably no larger thanthe width W1 of the first beams 441, 442 and the width W2 of the secondbeams 451, 452. In other words, W3<W1 and W3<W2 are preferablyfulfilled.

The third beam 453 extends from the frame 43 toward the positive side ofthe A axis to couple the frame 43 and the supporting base 42 to eachother. Further, the third beam 453 is disposed along the imaginarystraight line La. In other words, the third beam 453 is disposed inalignment with the pair of first beams 441, 442, and couples centralportions in the extending direction of the edge parts 433, 423 to eachother. By providing such an arrangement to the third beam 453, it ispossible to more effectively prevent the decrease in the degree offreedom of the frame 43 with respect to the supporting base 42.

Further, the drive signal interconnection 91 is laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 441, the frame 43, and the third beam 453. By laying around thedrive signal interconnection 91 through the third beam 453 as describedabove, it becomes easy to lay around the drive signal interconnection91. Further, it is possible to shorten the wiring length of the drivesignal interconnection 91 compared to the first embodiment describedabove. Further, since the number of the interconnections 9 passingthrough the second beams 451, 452 decreases from six to five compared tothe first embodiment described above, it becomes easy to lay around theinterconnections 9 on the second beams 451, 452. In particular, in thepresent embodiment, since the third beam 453 is disposed in alignmentwith the pair of first beams 441, 442, it is possible to dispose thedrive signal interconnection 91 on a straight line, and it is possibleto make the wiring length of the drive signal interconnection 91shorter.

Further, the first detection ground interconnection 94 is laid around tothe supporting base 42 from the element mounting base 41 through thefirst beam 441, the frame 43, and the second beam 451. Further, thesecond detection ground interconnection 96 is laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 441, the frame 43, and the second beam 452. Further, the driveground interconnection 92 and the first detection signal interconnection93 are each laid around to the supporting base 42 from the elementmounting base 41 through the first beam 442, the frame 43, and thesecond beam 451. Further, the second detection signal interconnection 95is laid around to the supporting base 42 from the element mounting base41 through the first beam 442, the frame 43, and the second beam 452.

According also to such an arrangement of the interconnections 91 through96, the drive signal interconnection 91 and the first and seconddetection signal interconnections 93, 95 are laid around to the elementmounting base 41 and the frame 43 passing through the respective innerbeams 440 different from each other, and further laid around to theframe 43 and the supporting base 42 passing through the respective outerbeams 450 different from each other. Therefore, the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are disposed with a sufficient distance, and itbecomes difficult for the drive signal interconnection 91 and the firstand second detection signal interconnections 93, 95 to interfere witheach other. Therefore, it becomes difficult for the noise caused by aninfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95, and it is possible to effectively suppress thedeterioration of the detection accuracy of the angular velocity ωc.

In particular, in the present embodiment, since only the drive signalinterconnection 91, namely one of the interconnections 9 alone, is madeto pass through the third beam 453, it is possible to make the width W3of the third beam 453 smaller. Therefore, the decrease in the degree offreedom of the frame 43 with respect to the supporting base 42 isprevented, and it becomes difficult for the stress to reach the vibratorelement 6 from the base 21. It should be noted that the number of theinterconnections 9 passing through the third beam 453 is notparticularly limited, but is preferably no larger than two, and is morepreferably one as in the case of the present embodiment. Thus, it ispossible to make the width W3 of the third beam 453 smaller.

As described above, in the vibrator device 1 according to the presentembodiment, the outer beams 450 includes the third beam 453 whichextends from the frame 43 to couple the frame 43 and the supporting base42 to each other. Further, one of the drive signal interconnection 91and the first and second detection signal interconnections 93, 95, forexample, the drive signal interconnection 91 in the present embodiment,is laid around to the frame 43 and the supporting base 42 through thethird beam 453. By laying around the drive signal interconnection 91through the third beam 453 as described above, it becomes easy to layaround the drive signal interconnection 91. Further, it is possible toshorten the wiring length of the drive signal interconnection 91compared to the first embodiment described above. Further, since thenumber of the interconnections 9 passing through the second beams 451,452 decreases from six to five compared to the first embodimentdescribed above, it becomes easy to lay around the interconnections 9 onthe second beams 451, 452.

Further, as described above, in the plan view from the direction alongthe C axis, the third beam 453 extends in the direction along the Aaxis, and is located in alignment with the first beams 441, 442. Thus,it is possible to make the wiring length of the drive signalinterconnection 91 shorter. Further, it is possible to more effectivelyprevent the decrease in the degree of freedom of the frame 43 withrespect to the supporting base 42 due to the third beam 453.

Further, as described above, the number of the interconnections 9passing through the third beam 453 is no larger than two. In particular,in the present embodiment, the number of the interconnections 9 passingthrough the third beam 453 is one. Thus, it is possible to make thewidth W3 of the third beam 453 smaller.

According also to such a second embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be exerted.

It should be noted that the wiring pattern of the interconnections 91through 96 is not particularly limited providing the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are laid around to the element mounting base 41and the supporting base 42 through the respective inner beams 440different from each other and the respective outer beams 450 differentfrom each other. For example, as shown in FIG. 10 , it is also possiblefor at least one of the first and second detection groundinterconnections 94, 96, the both thereof in the illustratedconfiguration, to be laid around to the supporting base 42 from theelement mounting base 41 through the first beam 441, the frame 43, andthe third beam 453 besides the drive signal interconnection 91.

Further, the arrangement of the third beam 453 is not particularlylimited. For example, it is possible for the third beam 453 to extendalong the A axis at a position shifted from the imaginary straight lineLa, or to extend in a direction different from the direction along the Aaxis.

Third Embodiment

FIG. 11 is a plan view showing a support substrate provided to avibrator device according to a third embodiment. FIG. 12 is a plan viewshowing a modified example of the support substrate shown in FIG. 11 .

The present embodiment is substantially the same as the secondembodiment described above except the point that the arrangement of thethird beam 453 and the arrangement of the interconnections 91 through 96are different. It should be noted that in the following description, thepresent embodiment will be described with a focus on the difference fromthe second embodiment described above, and the description ofsubstantially the same issues will be omitted. Further, in FIG. 11 andFIG. 12 , the constituents substantially the same as those of the secondembodiment described above are denoted by the same reference symbols.

As shown in FIG. 11 , in the support substrate 4 in the presentembodiment, the third beam 453 extends from the frame 43 toward thenegative side of the A axis to couple the frame 43 and the supportingbase 42 to each other. Further, the third beam 453 is disposed along theimaginary straight line La.

Further, the drive signal interconnection 91 and the second detectionground interconnection 96 are each laid around to the supporting base 42from the element mounting base 41 through the first beam 441, the frame43, and the second beam 452. Further, the first detection groundinterconnection 94 is laid around to the supporting base 42 from theelement mounting base 41 through the first beam 441, the frame 43, andthe second beam 451.

Further, the drive ground interconnection 92, the first detection signalinterconnection 93, and the second detection signal interconnection 95are each laid around to the supporting base 42 from the element mountingbase 41 through the first beam 442, the frame 43, and the third beam453. By laying around the first and second detection signalinterconnections 93, 95 through the third beam 453 as described above,it becomes easy to lay around the first and second detection signalinterconnections 93, 95. Further, it is possible to shorten the wiringlength of the first and second detection signal interconnections 93, 95compared to the first embodiment described above. Therefore, it becomesdifficult for the noise to be superimposed on the first and seconddetection signal interconnections 93, 95. In particular, since the thirdbeam 453 is disposed in alignment with the pair of first beams 441, 442,it is possible to dispose the first and second detection signalinterconnections 93, 95 on a straight line, and it is possible to makethe wiring length of the first and second detection signalinterconnections 93, 95 shorter. Further, since the number of theinterconnections 9 passing through the second beams 451, 452 decreasesfrom six to three compared to the first embodiment described above, itbecomes easy to lay around the interconnections 9 on the second beams451, 452.

According also to such an arrangement of the interconnections 91 through96, the drive signal interconnection 91 and the first and seconddetection signal interconnections 93, 95 are laid around to the elementmounting base 41 and the frame 43 passing through the respective innerbeams 440 different from each other, and further laid around to theframe 43 and the supporting base 42 passing through the respective outerbeams 450 different from each other. Therefore, the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are disposed with a sufficient distance, and itbecomes difficult for the drive signal interconnection 91 and the firstand second detection signal interconnections 93, 95 to interfere witheach other. Therefore, it becomes difficult for the noise caused by aninfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95, and it is possible to effectively suppress thedeterioration of the detection accuracy of the angular velocity ωc.

According also to such a third embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be exerted.

It should be noted that the wiring pattern of the interconnections 91through 96 is not particularly limited providing the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are laid around to the element mounting base 41and the supporting base 42 through the respective inner beams 440different from each other and the respective outer beams 450 differentfrom each other. For example, as shown in FIG. 12 , it is possible foreach of the drive ground interconnection 92 and the first detectionsignal interconnection 93 to be laid around to the supporting base 42from the element mounting base 41 through the first beam 442, the frame43, and the second beam 451. In such a configuration, since only thesecond detection signal interconnection 95 is made to pass through thethird beam 453, it is possible to make the width W3 of the third beam453 smaller. Therefore, the decrease in the degree of freedom of theframe 43 with respect to the supporting base 42 is prevented, and itbecomes difficult for the stress to reach the vibrator element 6 fromthe base 21.

Fourth Embodiment

FIG. 13 is a plan view showing a support substrate provided to avibrator device according to a fourth embodiment. FIG. 14 is a plan viewshowing a modified example of the support substrate shown in FIG. 13 .

The present embodiment is substantially the same as the second and thirdembodiments described above except the point that the number of thethird beams included in the outer beams 450 and the arrangement of theinterconnections 91 through 96 are different. It should be noted that inthe following description, the present embodiment will be described witha focus on the difference from the second and third embodimentsdescribed above, and the description of substantially the same issueswill be omitted. Further, in FIG. 13 and FIG. 14 , the constituentssubstantially the same as those of the second and third embodimentsdescribed above are denoted by the same reference symbols.

As shown in FIG. 13 , in the support substrate 4 in the presentembodiment, the outer beams 450 has a pair of third beams 453, 454 inaddition to the pair of second beams 451, 452. The pair of third beams453, 454 respectively extend from the frame 43 toward both the sides ofa direction along the A axis to couple the frame 43 and the supportingbase 42 to each other. Further, the pair of third beams 453, 454 aredisposed on a straight line along the imaginary straight line La, andare arranged in alignment with the pair of first beams 441, 442. Itshould be noted that this is not a limitation, and for example, it isalso possible for at least one of the pair of third beams 453, 454 to beshifted in a direction along the B axis from the imaginary straight lineLa.

Further, the drive signal interconnection 91 is laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 441, the frame 43, and the third beam 453. By laying around thedrive signal interconnection 91 through the third beam 453 as describedabove, it becomes easy to lay around the drive signal interconnection91. Further, it is possible to shorten the wiring length of the drivesignal interconnection 91 compared to the first embodiment describedabove.

Further, the first detection ground interconnection 94 is laid around tothe supporting base 42 from the element mounting base 41 through thefirst beam 441, the frame 43, and the second beam 451. Further, thesecond detection ground interconnection 96 is laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 441, the frame 43, and the second beam 452.

Further, the drive ground interconnection 92, the first detection signalinterconnection 93, and the second detection signal interconnection 95are each laid around to the supporting base 42 from the element mountingbase 41 through the first beam 442, the frame 43, and the third beam454. By laying around the first and second detection signalinterconnections 93, 95 through the third beam 454 as described above,it becomes easy to lay around the first and second detection signalinterconnections 93, 95. Further, it is possible to shorten the wiringlength of the first and second detection signal interconnections 93, 95compared to the first embodiment described above.

According also to such an arrangement of the interconnections 91 through96, the drive signal interconnection 91 and the first and seconddetection signal interconnections 93, 95 are laid around to the elementmounting base 41 and the frame 43 passing through the respective innerbeams 440 different from each other, and further laid around to theframe 43 and the supporting base 42 passing through the respective outerbeams 450 different from each other. Therefore, the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are disposed with a sufficient distance, and itbecomes difficult for the drive signal interconnection 91 and the firstand second detection signal interconnections 93, 95 to interfere witheach other. Therefore, it becomes difficult for the noise caused by aninfluence of the drive signal applied to the drive signalinterconnection 91 to mix in the first and second detection signalinterconnections 93, 95, and it is possible to effectively suppress thedeterioration of the detection accuracy of the angular velocity ωc.

As described above, in the vibrator device 1 according to the presentembodiment, the outer beams 450 includes the pair of third beams 453,454 which extend toward both the sides from the frame 43. Further, thedrive signal interconnection 91 and the first and second detectionsignal interconnections 93, 95 are laid around to the frame 43 and thesupporting base 42 through the respective third beams 453, 454 differentfrom each other. By laying around the drive signal interconnection 91and the first and second detection signal interconnections 93, 95through the third beams 453, 454 as described above, it becomes easy tolay around the drive signal interconnection 91 and the first and seconddetection signal interconnections 93, 95. Further, it is possible toshorten the wiring length of the drive signal interconnection 91 and thefirst and second detection signal interconnections 93, 95 compared tothe first embodiment described above.

According also to such a fourth embodiment as described above,substantially the same advantages as in the first embodiment describedabove can be exerted.

It should be noted that the wiring pattern of the interconnections 91through 96 is not particularly limited providing the drive signalinterconnection 91 and the first and second detection signalinterconnections 93, 95 are laid around to the element mounting base 41and the supporting base 42 through the respective inner beams 440different from each other and the respective outer beams 450 differentfrom each other. For example, as shown in FIG. 14 , it is possible forthe first detection signal interconnection 93 to be laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 442, the frame 43 and the second beam 451, and it is possible forthe second detection signal interconnection 95 to be laid around to thesupporting base 42 from the element mounting base 41 through the firstbeam 442, the frame 43, and the second beam 452. In such aconfiguration, since only the drive signal interconnection 91 is made topass through the third beam 453, and only the drive groundinterconnection 92 is made pass through the third beam 454, it ispossible to make the width W3 of the third beams 453, 454 smaller.Therefore, the decrease in the degree of freedom of the frame 43 withrespect to the supporting base 42 is prevented, and it becomes difficultfor the stress to reach the vibrator element 6 from the base 21.

Although the vibrator device, the electronic apparatus, and the vehicleaccording to the present disclosure are described based on theillustrated embodiments, the present disclosure is not limited thereto,but the configuration of each of the sections can be replaced with anarbitrary configuration having substantially the same function. Further,the present disclosure can also be added with any other constituents.Further, it is also possible to arbitrarily combine any of theembodiments with each other.

For example, although in the embodiments described above, the vibratorelement 6 is located above the support substrate 4, this is not alimitation, and it is possible for the vibrator element 6 to be located,for example, below the support substrate 4 and supported so as to besuspended from the support substrate 4. Further, although in theembodiment described above, the support substrate 4 is fixed to the base21, this is not a limitation, and for example, it is possible for thesupport substrate 4 to be fixed to the circuit element 3.

What is claimed is:
 1. A vibrator device comprising: a vibrator element;a support substrate configured to support the vibrator element; and aplurality of interconnections provided to the support substrate, whereinthe vibrator element includes a drive arm which is provided with a drivesignal electrode, and performs a drive vibration in response toapplication of a drive signal to the drive signal electrode, and adetection arm which is provided with a detection signal electrode, andperforms a detection vibration in accordance with a physical quantity ofa detection target to thereby output a detection signal from thedetection signal electrode, the support substrate includes, in a planview from a thickness direction of the support substrate, an elementmounting base on which the vibrator element is mounted, a supportingbase located outside the element mounting base, a frame located betweenthe element mounting base and the supporting base, and shaped like aframe surrounding the element mounting base, inner beams provided with apair of first beams which extend toward both sides along a firstdirection from the element mounting base to couple the element mountingbase and the frame to each other, and outer beams provided with a pairof second beams which extend toward both sides along a second directiondifferent from the first direction from the frame to couple the frameand the supporting base to each other, the plurality of interconnectionsincludes a drive signal interconnection which is electrically coupled tothe drive signal electrode, and is laid around to the element mountingbase and the supporting base, and a detection signal interconnectionwhich is electrically coupled to the detection signal electrode, and islaid around to the element mounting base and the supporting base, andthe drive signal interconnection and the detection signalinterconnection are laid around to the element mounting base and theframe through the respective inner beams different from each other, andare laid around to the frame and the supporting base through therespective outer beams different from each other.
 2. The vibrator deviceaccording to claim 1, wherein the outer beams include a third beam whichextends from the frame to couple the frame and the supporting base toeach other, and one of the drive signal interconnection and thedetection signal interconnection is laid around to the frame and thesupporting base through the third beam.
 3. The vibrator device accordingto claim 1, wherein the outer beams include a pair of third beamsextending from the frame toward both sides of the frame, and the drivesignal interconnection and the detection signal interconnection are laidaround to the frame and the supporting base through the respective thirdbeams different from each other.
 4. The vibrator device according toclaim 2, wherein in the plan view, the third beam extends in the firstdirection, and is located in alignment with the first beams.
 5. Thevibrator device according to claim 2, wherein a number of theinterconnections passing through the third beam is no larger than two.6. The vibrator device according to claim 1, wherein defining three axesperpendicular to each other as an A axis, a B axis, and a C axis, athickness direction of the support substrate is parallel to the C axis,and the vibrator element includes a base member fixed to the elementmounting base, a pair of the detection arms extending toward both sidesalong the B axis from the base member, a pair of coupling arms extendingtoward both sides along the A axis from the base member, a pair of thedrive arms extending toward both sides along the B axis from a tip partof one of the coupling arms, and a pair of the drive arms extendingtoward both sides along the B axis from a tip part of the other of thecoupling arms.
 7. The vibrator device according to claim 6, wherein thefirst direction is a direction along the A axis, and the seconddirection is a direction along the B axis.